Opera combines accurate finite element analysis with detailed models for plasma, sputtering, and film deposition to provide the first practical tools for magnetron design and optimization.
For the first time, designers of magnetrons and sputter coaters have access to an effective design simulation tool. In many areas of engineering and product design such tools have proven ability for enhancing performance, reducing costs and development timescales and aiding innovation to provide a competitive edge.
Opera can be used to predict target erosion and to optimize utilization. It can accurately characterize the design of magnet systems, including multi-target coaters, and it can predict deposited film profiles and the deposition dynamics.
- DC magnetron design and optimization
- Magnet array design
- Single and multi-target coaters
- Balanced and unbalanced configurations
- Target erosion profile and utilization
- Deposition rate
- Temperature rise/thermal loading