Opera’s flexible finite element mesh algorithms support the accurate design of systems ranging from nanometre-sized field emitters to a complete column consisting of many lenses. Error fields introduced by eddy currents caused by in-lens deflection coils can be modelled.
Opera can analyse the device using a combined field system
– Using both electric and magnetic fields
Opera Space Charge is capable of simulating all elements of
– Beam generation
– Beam focussing
– Beam transport
When designing something like a thermionic scanning electron microscope column, Opera’s static electromagnetic solver can help with design of the magnetic lenses, whilst the charged particle solver can analyse the resulting beam trajectory. Together they can assist with design decisions on dimensions and locations of the lenses, the Wehnelt location, bias voltage, and the aperture locations, amongst other parameters.